Nazrin Ismail M, Yusoff N, Hayati Saad N, Abd Rashid A. Design and Simulation of MEMS Moisture Sensor Using COMSOL Multiphysics Software. IJET [Internet]. 2018 Nov. 30 [cited 2024 Apr. 28];7(4.26):141-5. Available from: https://www.sciencepubco.com/index.php/ijet/article/view/22155