Design and Simulation of MEMS Moisture Sensor Using COMSOL Multiphysics Software

  • Authors

    • Muhamad Nazrin Ismail
    • Noriah Yusoff
    • Nor Hayati Saad
    • Amirul Abd Rashid
    2018-11-30
    https://doi.org/10.14419/ijet.v7i4.26.22155
  • COMSOL, MEMS, moisture sensor, capacitance, interdigitated device.
  • Micro-electro-mechanical system (MEMS) is a hybrid technology that combines electronic, electric and mechanical technology in a micron-size system. This allowed for higher performance and multifunction devices fabricated at much lighter weight and cost effective. One of the major application of MEMS is in sensor devices area. This paper highlight the simulation study of a typical moisture sensor fabricated from Tungsten Interdigitated (IDE) MEMS device. Using COMSOL Multiphysics software, the moisture sensor was modelled based on the current material and physical dimension and layout. The model then go through validation proses to its sensitivity performance against the experimental result. Subsequently, the optimization on sensor sensitivity was carried out by varying the model parameters including the sensor physical dimension, working temperature and humidity. The simulation result suggest that the sensor sensitivity is highly correlated to the electrode distance value. The average sensitivity of the sensor improved to ~48% better when the distance between reduced to 50% from 6 micron to 3 micron tested at temperature between 25 ÌŠ C to 45 ÌŠ C. This information is valuable as the input to the sensor designer in finalizing the MEMS physical layout in producing highly sensitive moisture sensor devices.

     

     

  • References

    1. [1] S. E. Lyshevski, MEMS and NEMS: System, Device and Structures. CRC Press Published January 18, 2002.

      [2] Introduction and M. January, Prime Faraday Technology Watch An Introduction to MEMS (Micro-electromechanical Systems) MEMS has been identified as one of the most promising technologies for PRIME Faraday Partnership, no. January. 2002.

      [3] M. J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition, no. Mar. CRC Press, 2002.A.V.

      [4] Y. Alexander , V. Mamishev Kishore, Sundara-Rajan Fumin, Y. Du, And Z. Markus, “Interdigital Sensors and transducers,†IEEE J. Proceeding, vol. 92, no. 5, p. 335, 2004.

      [5] Noriah Yusoff et al., “Design Of Experiment Using Minitab For Screening Breath Sensor Workability Performance,†J. Teknologi., vol. 11, no. 9, pp. 67–72, 2015.

      [6] Noriah Yusoff, Design and Simulation for an Automated Production Line for Manufacturing Injected Polyurethane Car Seats, April 2008.

      [7] Rosli Darmawan, Mohd. Rasid Osman, Rosmah Mohd Yusoff, Napsih Ismail, and Zulkiflie Leman, (2004). “Manufacturing Plant Performance Evaluation by Discrete Event Simulation.†Journal of Faculty Mechanical Engineering, Volume 1(Number 1), pp 1-14.

  • Downloads

  • How to Cite

    Nazrin Ismail, M., Yusoff, N., Hayati Saad, N., & Abd Rashid, A. (2018). Design and Simulation of MEMS Moisture Sensor Using COMSOL Multiphysics Software. International Journal of Engineering & Technology, 7(4.26), 141-145. https://doi.org/10.14419/ijet.v7i4.26.22155