Nazrin Ismail, Muhamad, Noriah Yusoff, Nor Hayati Saad, and Amirul Abd Rashid. “Design and Simulation of MEMS Moisture Sensor Using COMSOL Multiphysics Software”. International Journal of Engineering & Technology 7, no. 4.26 (November 30, 2018): 141–145. Accessed April 28, 2024. https://www.sciencepubco.com/index.php/ijet/article/view/22155.