NAZRIN ISMAIL, Muhamad; YUSOFF, Noriah; HAYATI SAAD, Nor; ABD RASHID, Amirul. Design and Simulation of MEMS Moisture Sensor Using COMSOL Multiphysics Software. International Journal of Engineering & Technology, [S. l.], v. 7, n. 4.26, p. 141–145, 2018. DOI: 10.14419/ijet.v7i4.26.22155. Disponível em: https://www.sciencepubco.com/index.php/ijet/article/view/22155.. Acesso em: 27 apr. 2024.