MUSTAFA, M K; MAJEED, U; IQBAL, Y. Effect on Silicon Nitride thin Films Properties at Various Powers of RF Magnetron Sputtering. International Journal of Engineering & Technology, [S. l.], v. 7, n. 4.30, p. 39–41, 2018. DOI: 10.14419/ijet.v7i4.30.22000. Disponível em: https://www.sciencepubco.com/index.php/ijet/article/view/22000.. Acesso em: 29 apr. 2024.