Modeling of Fast Neutral Atoms Flow Generation in Channel Rays of Glow Discharge

  • Authors

    • O. D. Volpian
    • A. I. Kuzmichev
    • Yu. A. Obod
    • A. S. Sigov
    2018-12-09
    https://doi.org/10.14419/ijet.v7i4.36.23321
  • nanostructured metamaterial, model, atom, technology
  • A physical-kinetic approach has been used for modeling of fast neutral atoms flow generation in the channel rays of abnormal glow discharge. The fast atoms are generated due to charge exchange of ions accelerated by voltage drop on the cathode layer of positive space charge. The limits of applicability of the created model and the range of operating parameters of the fast atom source are established for the Ar (gas) – Ta (cathode) pair. The work is directed towards implementation of the beam processing of dielectric optical nanostructured metamaterials with help of fast neutral atoms.

                                                                                   

     

  • References

    1. [1] Kuzmichev A I., Babinov N A. and Lisenkov A A 2016 Plasma emitters of sources of charged and neutral particles (Kiev: Avers)

      [2] Grigoriev S N, Melnik Yu A and Metel A S 2016 Sources of fast gas atoms and metal atoms for processing products (Moscow: CURS)

      [3] Economou D J 2009 Plasma Process. Polymers6 308-19

      [4] Volpian O D and Kuzmichev A I 2012 Negative refraction of waves. Introduction to physics and technology of electromagnetic metamaterials (Kiev-Moscow: Avers)

      [5] Shvartsburg A B, Obod Yu A, Kuzmichev A I, Volpian O D and Parkhomenko Yu N 2014 Opt. Mater. Exp.4 2250-61

      [6] Granovsky V L 1971 Electric current in gas (Moscow: Nauka)

      [7] Boldasov V S, Kuzmichev A I and Shabarov A Yu 1991 High temperature29 324–8

      [8] Boldasov V S, Denbnovetsky S V, Kuzmichev A I and Filipychev D S 1990 Automation of design in electronics41 90-7

      [9] Magnuson L and Carlston C E 1963 Phys. Rev. 129 2403–8

      [10] Abril I, Gras-Marti A and Valles-Abarca J A 1984 J. Phys. D: Appl. Phys.17 1841–9

      [11] Phelps A V and Petrovic Z Lj 1999 Plasma Sources Sci. Technol.8 R21–44

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  • How to Cite

    D. Volpian, O., I. Kuzmichev, A., A. Obod, Y., & S. Sigov, A. (2018). Modeling of Fast Neutral Atoms Flow Generation in Channel Rays of Glow Discharge. International Journal of Engineering & Technology, 7(4.36), 92-94. https://doi.org/10.14419/ijet.v7i4.36.23321