Effects of Pulsed Nd:YAG Laser on Pt/Ag Thin Film Metal Contacts

  • Authors

    • Bibi Zulaika Bhari
    • Ahmad Hadi Ali
    2018-11-30
    https://doi.org/10.14419/ijet.v7i4.30.22288
  • Band gap, DC magnetron, Nd, YAG laser, Pt/Ag, Thin films

  • This study focused on the effect of laser annealing on Pt/Ag metal contacts deposited on Silicon, (Si) substrates. DC sputtering was used to deposit the metal thin films on the Si. The samples were treated by annealing using pulsed Nd:YAG laser. Then, the samples were characterized based on its morphological, optical, structural and electrical properties. From surface morphological, it is clearly shown that the surface roughness of the laser annealed sample is smoother than the as-deposited sample. The calculated energy band gap was obtained as 1.38 eV. For electrical properties, the resistivity for laser anneal was lower compared to as-deposited sample, which are     5.10 × 10-4 ohm-cm and 1.37 × 10-3 ohm-cm respectively. The conductivity increases when the resistivity decreases.

  • References

    1. [1] Chuah LS, Hassan Z & Hassan HA (2010), Ohmic Contacts properties of Ni/Ag metallization scheme on p-type GaN. Journal Non-Crystalline Solids 356, 181–185.

      [2] Reddy VR (2005), Electrical and structural properties of low-resistance Pt/Ag/Au ohmic contacts to p-type GaN 49, 1213–1216.

      [3] Ali AH, Shuhaimi A, Bakar A & Hassan Z (2014), Improved optoelectronics properties of ITO-based transparent conductive electrodes with the insertion of Ag / Ni under-layer, Applied Surface Science 315, 387–391.

      [4] Varma T, Periasamy C & Boolchandani D (2017), Superlattices and Microstructures Performance analyses of Schottky diodes with Au/Pd contacts on n-ZnO thin films as UV detectors, Superlattices Microstructure 112,151–163.

      [5] Vinodkumar R, Navas I, Chalana S R, Gopchandran K G, Ganesan V, Philip Reji, Sudheer S K & Mahadevan Pillai V P (2010), Applied Surface Science Highly conductive and transparent laser ablated nanostructured Al : ZnO thin films. Applied Surface Science, 257(3), 708–716.

      [6] Hadi A, Hassan Z & Shuhaimi A (2016), High figure of merit of the post-annealed Ti/Al/ ITO transparent conductive contacts sputter deposited on n-GaN. Journal Alloys Compounds 681,186–190.

      [7] Takeda S, Suzuki S, Odaka H & Hosono H (2001), Photocatalytic TiO2 thin film deposited onto glass by DC magnetron sputtering, Thin Solid Films, 392(2), 338–344.

      [8] Leem JW & Yu JS (2010), Structural, optical, and electrical properties of AZO films by tilted angle sputtering method. Journal Thin Solid Film. 518, 6285–6288.

      [9] Watanabe R, Tsukamoto T, Kamisako K & Suda Y (2017), Crystallinity control of SiC grown on Si by sputtering method. Journal Crystal Growth 463, 67–71.

      [10] Cheng Y, Wu H, Lin Y, Lee C & Lin C (2015), Post-annealing effects on pulsed laser deposition-grown GaN thin films. Thin Solid Films 577, 17–25.

      [11] Nie M, Zhao Y & Zeng Y (2014), Effects of annealing and laser irradiation on optical and electrical properties of ZnO thin films, Journal Laser Applicaton 26(2), 1–6.

      [12] Zhang K, Zhu F, Huan CHA & Wee ATS (2000), Indium tin oxide films prepared by radio frequency magnetron sputtering method at a low processing temperature. Journal Thin Solid Film. 376, 255–263.

      [13] Ida SO, Akai AS, Ã ONA, Gawa MO, and Aima SZ (2008), Epitaxial Ag Layers on Si Substrates as a Buffer Layer for Carbon Nanotube Growth Epitaxial Ag Layers on Si Substrates as a Buffer Layer for Carbon Nanotube Growth. Japanese Journal Applied Physics, 47(5), 3742–3747.

      [14] Gholami-shabani M & Shams-ghahfarokhi M (2016), Biogenic Approach using Sheep Milk for the Synthesis of Platinum Nanoparticles : The Role of Milk Protein in Platinum Reduction and Biogenic Approach using Sheep Milk for the Synthesis of Platinum Nanoparticles : The Role of Milk Protein in Platinum Reduction and Stabilization.

      [15] Khudiar AI, Zulfequar M & Khan ZH (2009), Laser radiation effects on optical and structural properties of nanostructure CdSe thin film, Radiation Effects Defects Solids, 164, no. 9, 551–560.

      [16] Khurram M, Atiq S, Bashir S, Riaz S, & Naseem S (2016), Pulsed laser deposition of SmCo thin films for MEMS applications. Rev. Mex. Trastor. Aliment..

      [17] Higuchi M, Uekusa S, Nakano R & Yokogawa K (1993), Micrograin structure influence on electrical characteristics of sputtered indium tin oxide films Micrograin structure influence indium tin oxide films on electrical characteristics. Journal of Applied Physics 74, 6710.

      [18] Lin HK, Cheng KC, & Huang JC (2015), Effects of Laser Annealing Parameters on Optical and Electrical Properties of ITO / Metallic Glass Alloy Bi-layer Films. Nanoscale Res. Letter, 1–8.

      [19] Shah MA (2012), Growth of uniform nanoparticle of platinum by an econimical approach at relatively low temperature 19, 964-966.

  • Downloads

  • How to Cite

    Bhari, B. Z., & Ali, A. H. (2018). Effects of Pulsed Nd:YAG Laser on Pt/Ag Thin Film Metal Contacts. International Journal of Engineering & Technology, 7(4.30), 291-294. https://doi.org/10.14419/ijet.v7i4.30.22288